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A light reflectance technique for thickness measurements of passive films

机译:一种用于无源膜厚度测量的光反射技术

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摘要

A new in situ technique to determine the thickness of passive films is reported. In the present work, this technique is applied to the passive film on iron in berate buffer. The method is based on the light absorption of the oxide film for light energies higher than the band gap energy of the oxide. By using laser lines of 325 nm and 441 nm, the light absorption in the passive film on iron becomes accessible by measuring the difference in the reflectance of the electrode surface prior to and after passivation. The results for the absorption coefficient and for the film thickness obtained with this technique are in good agreement with values from the literature. (C) 1997 Elsevier Science Ltd. [References: 13]
机译:报道了一种用于确定无源膜厚度的新的原位技术。在目前的工作中,该技术被应用于贝拉特缓冲器中的铁上的无源膜。该方法基于对于高于氧化物的带隙能量的光能量的氧化膜的光吸收。通过使用325 nm和441 nm的激光线,通过测量钝化前后的电极表面反射率差异,可以访问铁上钝化膜中的光吸收。用该技术获得的吸收系数和膜厚度的结果与文献中的值非常一致。 (C)1997 Elsevier Science Ltd. [引用:13]

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