LAMINATED STRUCTURE FOR MEASUREMENT OF INTENSITY OF REFLECTED LIGHT, DEVICE EQUIPPED WITH LAMINATED STRUCTURE FOR MEASUREMENT OF REFLECTED LIGHT, AND METHOD FOR DETERMINATION OF THICKNESS AND/OR MASS AND/OR VISCOSITY OF THIN FILM

摘要

Disclosed is a laminated structure for measuring the intensity of reflected light, which can determine the thickness of a surface adsorbed film or the like with higher sensitivity by a simple optical technique.Specifically disclosed is a laminated structure for measuring the intensity of reflected light at at least one wavelength, which comprises an optical interference layer comprising a valve metal such metal titanium; and a method for determining the thickness or mass of a thin film of interest, which comprises irradiating the thin film with light in the laminated structure, and measuring the change in the intensity of reflected light at at least one wavelength in a measurement medium, thereby determining the thickness and/or mass and/or viscosity of the thin film.