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Method for producing a transparent cured film using a half exposure positive photosensitive resin layer

机译:使用半曝光正型感光性树脂层的透明固化膜的制造方法

摘要

Method of producing a transparent cured film with an exposure wide margin, while maintaining the present invention relates sensitive, inter alia, in the transflective liquid crystal display device, applicable to the production of TFT flattening film, in particular, the half exposure to provide a method for producing a transparent cured film for simultaneously forming a reflection irregularities and contact holes. SOLUTION: A substrate, in such a manner that the positive photosensitive resin layer having a low sensitivity is located in the positive photosensitive resin layers of high sensitivity and the substrate a positive photosensitive resin layer of two layers with different exposure sensitivity method for producing a transparent cured film, characterized in that it comprises a step of laminating to, exposing the positive photosensitive resin layer is heated after exposure, development, post-baked. And a display device having a transparent cured film obtained by such a method. None [Selection Figure]
机译:在保持本发明的同时,具有宽的曝光余量的透明固化膜的制造方法尤其涉及半透反射型液晶显示装置,该方法适用于TFT平坦化膜的制造,特别是半曝光以提供透明的薄膜。透明固化膜的制造方法,该透明固化膜同时形成反射凹凸和接触孔。解决方案:基板,以使具有低感光度的正感光树脂层位于高感光度的正感光树脂层中,以及基板为具有不同曝光感光度方法的两层正感光树脂层,以生产透明胶片。固化膜,其特征在于它包括层压,曝光,显影,后烘烤后将正型光敏树脂层加热的步骤。以及具有通过这种方法获得的透明固化膜的显示装置。无[选择图]

著录项

  • 公开/公告号JP5083566B2

    专利类型

  • 公开/公告日2012-11-28

    原文格式PDF

  • 申请/专利权人 日産化学工業株式会社;

    申请/专利号JP20080535354

  • 发明设计人 畑中 真;

    申请日2007-09-18

  • 分类号G03F7/26;G03F7/039;H01L21/027;G03F7/095;

  • 国家 JP

  • 入库时间 2022-08-21 16:54:03

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