Production method of tunic formation ones and tunic formation ones

摘要

Forming the tunic which includes the constitution element of the target due to sputtering method on the surface of the baseplate, being the method of producing tunic formation ones, production method of tunic formation ones which it makes the range of 1.5 times from 0.5 times vis-a-vis the mean free path in distance d of the aforementioned target and the aforementioned baseplate, in the spatter gas of the aforementioned constitution element, is offered.