Hard lamination tunic, hard lamination tunic coating tool, and tunic formation method

摘要

As shown in Figure 1, as for the hard lamination tunic 20 which is provided in blade section 14 of end mill 10, MX (B _a C _b O _c N_1-a-b-c) being similar, the 1st tunic 22 which is formed and ZQ (B _d C _e O _f N_1-d-e-f) being similar, being something where the 2nd tunic 24 which is formed is laminated alternately, as for metal element MX of 2 types and ZQ because it is different mutually, you can obtain the resistance abrasiveness which is superior by comparison with the case where it includes the same metal element. In addition, as 1st tunic 22 is formed MX alloy as the 1st target in order to form 2nd tunic the ZQ alloy as the 2nd target, M and X, the single unit metal of Z and Q as a target 1st tunic 22, by comparison with the case where 2nd tunic 24 is formed, you can obtain more high resistance abrasiveness. Furthermore, because 1st tunic lamination period t of 22 and 2nd tunic 24 is inside the range of 0.2nm - 100nm, while both tunics enjoying the quality of 22 and 24, the tunic hardness due to thin film conversion (resistance abrasiveness) the improvement effect stabilizing, it can. This way, it reaches the point where you can obtain the improvement effect of the tunic hardness due to the alloy and thin film conversion and multilayer conversion of the metal element of 2 types more ideally, resistance abrasiveness improves comprehensively more.