Laser annealing device and laser annealing method using a pulsed laser diode

摘要

A generil pulse waveform rises sharply from a starting time point of oscillation, shows a peak, and thereafter, decreases gently. At the time point when power shows a peak, the surface of an annealing object (30) is sharply heated and reaches a high temperature. Since time showing the peak is an instant, it is difficult to sufficiently heat a deep region of an annealing object (30). A laser pulse is emitted from a laser diode (12) when a pulse current is input. An optical system (13,15,16,19,20) that guides a laser beam emitted from the laser diode (12) to an annealing object (30). A driver (10) supplies a pulse current that has a time waveform of a top flat and a pulse width of 1 µs to 100 µs to the laser diode (12).