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TRANSPARENT CONDUCTIVE FILM, PRODUCTION METHOD THEREFOR, MATERIAL FOR ELECTRONIC DEVICE, AND ELECTRONIC DEVICE

机译:透明导电膜,其制造方法,电子设备用材料以及电子设备

摘要

The present invention provides a transparent conductive film including a base layer, a gas barrier layer, and a transparent conductive layer, the gas barrier layer being formed of a material that includes at least oxygen atoms, carbon atoms, and silicon atoms, the gas barrier layer including an area (A) in which an oxygen atom content rate gradually decreases, and a carbon atom content rate gradually increases from a surface in a depth direction, the area (A) including a partial area (A1) and a partial area (A2), the partial area (A1) having an oxygen atom content rate of 20 to 55%, a carbon atom content rate of 25 to 70%, and a silicon atom content rate of 5 to 20%, based on a total content rate of oxygen atoms, carbon atoms, and silicon atoms, and the partial area (A2) having an oxygen atom content rate of 1 to 15%, a carbon atom content rate of 72 to 87%, and a silicon atom content rate of 7 to 18%, based on a total content rate of oxygen atoms, carbon atoms, and silicon atoms.
机译:本发明提供一种透明导电膜,其包括基底层,阻气层和透明导电层,所述阻气层由至少包括氧原子,碳原子和硅原子的材料形成,所述阻气层包括区域(A)的层(A)中的氧原子含量比率逐渐降低,而碳原子含量比率从深度方向的表面开始逐渐增加,该区域(A)包括部分区域(A1)和部分区域( A2),以总含量为基准,氧原子含量为20〜55%,碳原子含量为25〜70%,硅原子含量为5〜20%的部分区域(A1)。氧原子含量,碳原子含量和硅原子含量分别为1至15%,氧原子含量为1至15%,碳原子含量为72至87%,硅原子含量为7至10的部分区域(A2) 18%,基于氧原子,碳原子和硅原子的总含量。

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