POLY SILICON MANUFACTURING DEVICE CAPABLE OF MANUFACTURING THE POLY SILICON OF HIGH PURITY BY COLLECTING POWDER GENERATED IN THE PYROLYSIS OF REACTION GAS

摘要

PURPOSE: A poly silicon manufacturing device is provided to manufacture the poly silicon of high purity by collecting powder generated in the pyrolysis of reaction gas.;CONSTITUTION: A poly silicon manufacturing device includes at least one silicon filament, a dummy bar, and a refrigerant supply line(18). A poly silicon is deposited on the surface of a silicon filament. A dummy bar is installed at the one side of the silicon filament. A dummy bar has a refrigerant channel in which a refrigerant flows. A refrigerant supply line is connected to the refrigerant channel and supplies the refrigerant. The poly silicon manufacturing device includes a jacket, a heat transfer medium supply line, at least one gas nozzle, and a gas supply line. A jacket is arranged along the length direction of the silicon filament and wraps the silicon filament. A heat transfer medium supply heats to the jacket with a preset temperature by supplying a heat transfer medium to the jacket. A gas nozzle supplies reaction gas to the inside of the jacket.;COPYRIGHT KIPO 2013