DEVICE AND METHOD FOR ATTACHING POLY-CRYSTAL SILICON CAPABLE OF MANUFACTURING POLYCRYSTALLINE ROD FROM HIGH PURITY SILICON

摘要

PURPOSE: A device and a method for attaching poly-crystal silicon are provided to manufacture polycrystalline rod from high purity silicon having rough surface with economically low cost by locating a filament rod and a gas inlet inside of a reactor.;CONSTITUTION: A device for attaching poly-crystal silicon comprises a reactor wall(32) and a reactor chamber. The reactor chamber comprises 20 or more of filament rods and a gas inlet(22) for a gas reaction inside of the reactor chamber. The each filament rod except the filament rod near the reactor wall comprises 3 extra filament rods near 150-450mm and 1-3 of close gas inlet holes.;COPYRIGHT KIPO 2013