INLINE SYSTEM APPARATUS FOR HIGH SPEED MANUFACTURING OF LARGE-SIZED CIGS THIN FILM ON GLASS SUBSTRATE USING MULTI-STAGE PROCESS AND METHODS MNUFACTURING LARGE-SIZED CIGS THIN FILM

摘要

PURPOSE: An inline system for manufacturing a large-sized CIGS thin film using a multistage process and a method for manufacturing the large-sized CIGS thin film are provided to improve the throughput of a large-sized solar cell of high efficiency. CONSTITUTION: A substrate is linearly transferred by a roller in a loading chamber(102). A deposition chamber 1(104) includes a Na source chamber 1(170, 171). A deposition chamber 2(105) includes an In source chamber 1(120), a Ga source chamber 1(121), and a Se source chamber 1(122), and an In source chamber 2(123), a Ga source chamber 2(124), and a Se source chamber 2(125). A deposition chamber 3(107) includes a Cu source chamber 1(130), a Se source chamber 3(131), and a Cu source chamber 2(132) and a Se source chamber 4(133). A glass substrate is detached from a tray in an unloading chamber(114).