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Inline system apparatus for high speed manufacturing of large-sized CIGS thin film on glass substrate using multi-stage process and Methods mnufacturing large-sized CIGS thin film
Inline system apparatus for high speed manufacturing of large-sized CIGS thin film on glass substrate using multi-stage process and Methods mnufacturing large-sized CIGS thin film
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机译:使用多阶段工艺在玻璃基板上高速制造大型CIGS薄膜的在线系统设备及制造大型CIGS薄膜的方法
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摘要
PURPOSE: An inline system for manufacturing a large-sized CIGS thin film using a multistage process and a method for manufacturing the large-sized CIGS thin film are provided to improve the throughput of a large-sized solar cell of high efficiency. CONSTITUTION: A substrate is linearly transferred by a roller in a loading chamber(102). A deposition chamber 1(104) includes a Na source chamber 1(170, 171). A deposition chamber 2(105) includes an In source chamber 1(120), a Ga source chamber 1(121), and a Se source chamber 1(122), and an In source chamber 2(123), a Ga source chamber 2(124), and a Se source chamber 2(125). A deposition chamber 3(107) includes a Cu source chamber 1(130), a Se source chamber 3(131), and a Cu source chamber 2(132) and a Se source chamber 4(133). A glass substrate is detached from a tray in an unloading chamber(114).
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