ELECTRONIC DEVICE AND A MANUFACTURING METHOD THEREOF CAPABLE OF IMPROVING THE RELIABILITY OF A MULTILAYER INTERCONNECTION STRUCTURE

摘要

PURPOSE: An electronic device and a manufacturing method thereof are provided to prevent the generation of dishing by forming a metal layer on a first line pattern.;CONSTITUTION: A line groove is formed on the surface of a first insulating layer(2). The line groove is filled with a line pattern. A metal layer(3B) is formed on the surface of the line pattern. A second insulating layer(3) is formed on the first insulating layer. A via plug(5A) is formed in the second insulating layer.;COPYRIGHT KIPO 2013