SEMICONDUCTOR TEST JIG AND A METHOD FOR MEASURING A BREAKDOWN VOLTAGE USING THE SAME, WHICH IS APPROPRIATE FOR MEASURING A BREAKDOWN VOLTAGE OF A WIDE BANDGAP SEMICONDUCTOR

摘要

PURPOSE: A semiconductor test jig and a method for measuring a breakdown voltage using the same are provided to perform breakdown voltage measurement of a semiconductor chip in a low cost without atmospheric discharge.;CONSTITUTION: A susceptor(1) has a probe pin(3) and an insulator(2). The insulator is installed to surround the probe pin. A bottom electrode stage(7) is arranged on a plane where the probe pin and the insulator of the susceptor are installed, and a semiconductor chip(4) is mounted on the plane of the susceptor. The probe pin contacts a surface electrode(5) formed in the semiconductor chip, and the insulator contacts the semiconductor chip and both sides of the bottom electrode stage at the same time. A surface electrode is formed on the surface of the semiconductor chip and a protection film(6) is formed at a termination part.;COPYRIGHT KIPO 2013