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JIG FOR USE IN SEMICONDUCTOR TEST AND METHOD OF MEASURING BREAKDOWN VOLTAGE BY USING THE JIG
JIG FOR USE IN SEMICONDUCTOR TEST AND METHOD OF MEASURING BREAKDOWN VOLTAGE BY USING THE JIG
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机译:用于半导体测试的夹具和使用夹具测量击穿电压的方法
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摘要
A jig for use in a semiconductor test of the present invention includes; a base on which a probe pin and an insulating material are provided such that the probe pin is surrounded by the insulating material in plan view; and a stage arranged to face a surface of the base on which the probe pin and the insulating material are provided. The stage is capable of receiving a test object placed on a surface facing the base. When the test object is placed on the stage and the base and the stage move in a direction in which they get closer to each other, the probe pin comes into contact with an electrode formed on the test object, and the insulating material comes into contact with both the test object and the stage.
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