atmospheric thin film treatment apparatus, thin film treatment method, repair line and substrate using thereof

摘要

An atmospheric thin film treatment apparatus, a thin film treatment method, a repair line, and a substrate using the repair line are provided to increase a manufacturing speed of a flat panel display device by increasing a deposition speed of the repair line. An atmospheric thin film treatment apparatus includes a stage(110), a gas shield(120), an energy source(140), and a reaction gas supply unit(150). Substrates are mounted on the stage. The gas shield is arranged on the stage and includes a retention hole and two supply paths, which are coupled with the retention hole. The energy source is arranged on the gas shield and illuminates a laser beam on the substrate through the retention hole. The reaction gas supply unit sequentially or simultaneously supplies different reaction gases on the supply paths.