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Polycrystalline silicon, breaking piece and a process for the purification of the polycrystalline silicon breakage pieces
Polycrystalline silicon, breaking piece and a process for the purification of the polycrystalline silicon breakage pieces
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机译:多晶硅碎块和多晶硅碎块的纯化方法
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摘要
The object of the invention is a polycrystalline silicon, breaking piece with a concentration of carbon at the surface of 0,5 – 35 ppbw.A process for the purification of the polycrystalline silicon breakage pieces with carbon - contamination on the surface, comprising a thermal treatment of the polycrystalline smaller in a reactor at a temperature of 350 to 600°C, wherein the polycrystalline smaller during the thermal treatment in an inert gas atmosphere are provided, with the polycrystalline smaller after the thermal treatment, a concentration of carbon at the surface of 0,5 – 35 have ppbw.
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