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Polycrystalline silicon, breaking piece and a process for the purification of the polycrystalline silicon breakage pieces

机译:多晶硅碎块和多晶硅碎块的纯化方法

摘要

The object of the invention is a polycrystalline silicon, breaking piece with a concentration of carbon at the surface of 0,5 – 35 ppbw.A process for the purification of the polycrystalline silicon breakage pieces with carbon - contamination on the surface, comprising a thermal treatment of the polycrystalline smaller in a reactor at a temperature of 350 to 600°C, wherein the polycrystalline smaller during the thermal treatment in an inert gas atmosphere are provided, with the polycrystalline smaller after the thermal treatment, a concentration of carbon at the surface of 0,5 – 35 have ppbw.
机译:发明内容本发明的目的是在表面上碳的浓度为0.5-35ppbw的多晶硅碎块。一种纯化具有碳的多晶硅碎块的方法-表面上的污染,包括热在350至600℃的温度下在反应器中处理较小的多晶,其中提供在惰性气体气氛中热处理期间较小的多晶,热处理后较小的多晶在表面处的碳浓度0.5-35中有ppbw。

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