Polycrystalline silicon piece and method for breaking a silicon body to siloxene

摘要

The present invention relates to a polycrystalline silicon piece with at least one fracture - or cut surface, the contamination with metals of 0,07 ng / cm² to 1 ng / cm² having.The present invention also relates to a process for breaking a silicon body to siloxene, preferably of a rod made of polycrystalline silicon,comprising the steps of:a) determination of the lowest bending strength frequency of the silicon body to siloxene;b) excitation of the silicon body to siloxene in its lowest bending strength frequency by means of a vibration exciter, wherein the excitation to a stimulus agency of the silicon body to siloxene is effected in such a way that the silicon body breaks at the point of excitation;so that a silicon piece with of a fractured surface results which is a contamination with metals of 0,07 ng / cm² to 1 ng / cm² having.