How to set up the substrate processing apparatus , manufacturing method and substrate processing apparatus of a semiconductor device that is implemented by the substrate processing apparatus

摘要

PROBLEM TO BE SOLVED: To shorten a time required for a setup process when starting the operation of a substrate processing apparatus with a plurality of process furnaces.;SOLUTION: A method for setup of a substrate processing apparatus includes: connecting a test terminal, which includes a pseudo comprehensive control unit and a second operation unit, to a plurality of process furnace control units respectively with the process furnace control units PMC1, PMC2 being separated from a comprehensive control unit 90 and a first operation unit 100 respectively; transmitting a test operation command from the second operation unit to the plurality of process furnace control units through the pseudo comprehensive control unit; testing operations of the plurality of process furnaces PM1, PM2 in parallel by the plurality of process furnace control units receiving the process furnace test operation command; and transmitting a test operation report from the plurality of process furnace control units to the second operation unit through the pseudo comprehensive control unit.;COPYRIGHT: (C)2010,JPO&INPIT