Patent Issued for Setup Method of Substrate Processing Apparatus

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Patent Issued for Setup Method of Substrate Processing Apparatus

机译：基板处理装置的设置方法已取得专利

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2012 NOV 5 (VerticalNews) -- By a News Reporter-Staff News Editor at Robotics & Machine Learning --nHitachi Kokusai Electric Inc. (Tokyo, JP) has been issued patent number 8295968, according to newsnreporting originating out of Alexandria, Virginia, by VerticalNews editors.

机译：2012年11月5日（垂直新闻）-机器人与机器学习新闻记者-职员新闻编辑-日立国分电气公司（日本东京）已获专利号8295968，据来自弗吉尼亚州亚历山大市的newsnreporting报道，由VerticalNews编辑。

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《Robotics and Machine Learning》 |2012年第45期|1-3|共3页
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Robotics, Machine Learning, Emerging Technologies, Hitachi Kokusai Electric Inc..;

机译：日立国际有限公司的机器人技术;机器学习;新兴技术;

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Patent Issued for Setup Method of Substrate Processing Apparatus

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