Catadioptric projection objective having an inclined deflecting mirror , a projection exposure apparatus , a projection exposure method , and a mirror

摘要

Catadioptric projection objective comprising a plurality of optical elements, a projection exposure apparatus, a projection exposure method using such a projection objective, and to provide a mirror. Catadioptric projection objective includes a plurality of optical elements arranged along an optical axis for imaging the array pattern on the object surface of the projection objective onto an image surface of the projection objective. Optical elements, and a concave mirror, the light from the object surface is deflected toward the concave mirror, or a first inclination angle to the first tilt axis light from the concave mirror to deflect toward the image surface includes a first deflecting mirror which is inclined with respect to t ₁ by the optical axis and a second deflecting mirror which is inclined to the second inclination angle t ₂ only optical axis to a second inclined axis. First deflection mirror is incident on the first deflecting mirror at _{(t 1 -Δα 1) ≦ α} 1 (t 1 + Δα1) first incident angle alpha ₁ of the first incident angle range according to the s- a first reflective coating having a reflectivity _R p1 (α1) relative to the reflectivity ^_R s 1 (α 1) and p- polarized light to polarized light. Second deflecting mirror is incident on the second deflecting mirror in _{(t 2 -Δα 2) ≦ α} 2 ≦ (t 2 + Δα 2) the second incident angle 02 from the second incident angle range in accordance with the s- a second reflective coating having a reflectivity ^_R p 2 (α 2) with respect to reflectance ^_R s 2 (α2) and p- polarized light to polarized light. The first reflectivity sum R _s^PE regarding s- polarized light poles edge rays accumulated upon reflection on the first and second deflection mirror is accumulated during the reflection on the first and second deflecting mirror second reflectance on the p- polarized light of the equatorial edge rays sum ^_R p E and substantially equal. .FIELD 2