机译:深紫紫外线光刻分组设计方法
Beijing Institute of Technology School of Optoelectronics Key Laboratory of Photoelectronic Imaging Technology and System of Ministry of Education of China Beijing China;
Beijing Institute of Technology School of Optoelectronics Key Laboratory of Photoelectronic Imaging Technology and System of Ministry of Education of China Beijing China;
Beijing Institute of Technology School of Optoelectronics Key Laboratory of Photoelectronic Imaging Technology and System of Ministry of Education of China Beijing China;
grouping design method; optical design; deep ultraviolet lithography; lithographic objective; optical system;
机译:曲率组合法设计用于极端紫外光刻的变倍高数值孔径物镜
机译:曲率组合法设计用于极端紫外光刻的变倍高数值孔径物镜
机译:设计11纳米极紫外光刻节点的投影物镜
机译:深紫外长焦距的消色差折反射显微镜物镜
机译:强烈的毛细管放电等离子体极紫外光源,用于极紫外光刻和其他极紫外成像应用。
机译:通过无光刻法在AlN纳米棒上的深紫外AlGaN / AlN核壳多量子阱
机译:全玻璃,使用深紫外投影光刻的可见波长的全玻璃,大金属
机译:用于极紫外光刻的10x投影的多层涂层