Catadioptric projection objective having an inclined deflecting mirror, a projection exposure apparatus, a projection exposure method, and a mirror

摘要

PROBLEM TO BE SOLVED: To provide a catadioptric projection objective that has tilted deflecting mirrors which allow imaging of patterns including sub-patterns oriented in various directions.;SOLUTION: As to a first deflecting mirror having a first reflective coating with a reflectivity R_s¹(α₁) for s-polarized light and a reflectivity R_p¹(α₁) for p-polarized light both incident at a first angle of incidence α₁ according to (t₁-Δα₁)≤α₁(t₁+Δα₁), and a second deflecting mirror having a second reflective coating with a reflectivity R_s²(α₂) for s-polarized light and a reflectivity R_p²(α₂) for p-polarized light both incident at a second angle of incidence α₂ according to (t₂-Δα₂)≤α₂≤(t₂+Δα₂), a first reflectivity sum R_s^PE for s-polarized light of polar edge rays accumulated upon reflection on them is substantially equal to a second reflectivity sum R_p^E for p-polarized light of equatorial edge rays accumulated upon reflection.;COPYRIGHT: (C)2015,JPO&INPIT