And the device in order to watch the optical device and the consumption of the electrostatic chuck in order to use with methodological null

摘要

SolutionsThe device which is disclosed, in order to be installed in the edge bead of the electrostatic chuck, includes the edge connecting seal which is formed. The edge connecting seal, in order optically to discharge supervisory possible kind, or in order to possess supervisory possible electric value of resistance, or as been the both, includes the supervisory layer which consists of the 1st material which is formed. The edge connecting seal includes, in order furthermore, at least to be scattered with supervisory layer and plasma environment, the edge connecting layer which is formed. Edge connecting layer when to receive the erosion which originates in the reaction with the plasma environment it is disclosed to plasma environment easily sufficiently as disclosed supervisory layer to plasma environment, consists of the 2nd material which is formed. Selective figure Figure 2