Methodology for Design of Electrostatic MEMS Devices Using the SUMMiT Process

摘要

The NCSU MEMS group has been developing low-power electrostatically-driven polysilicon-based devices with metalization for two application devices: a high-performance electrical crossbar, and an airborne LIDAR beam steerer. These device designs differ from those typical in the SUMMiT process, in that they involve vertical motion and post-process metalization. Our development has only recently shifted in fabrication technologies from MCNC's MUMPs to Sandia's SUMMiT MEMS technology. Due to this shift, we have also developed tools and techniques to supplement Cadence, MEMCAD, and the SUMMiT design rules.