Method for testing semiconductor wafer test equipment and semiconductor wafer

摘要

A tray main body portion 62 for supporting the fine movement with the mounting plate 61 mounting wafer semiconductor wafer 100 is placed, the mounting plate 61 mounting wafer, the wafer tray 60 for holding the semiconductor wafer 100, the vibration in the mounting plate 61 and the mounting wafer I'm equipped with a vibration actuator 64 for granted.