TESTING METHOD FOR SEMICONDUCTOR WAFER, SEMICONDUCTOR WAFER TRANSPORT DEVICE, AND SEMICONDUCTOR WAFER TESTING DEVICE

摘要

A method for testing a semiconductor wafer (100) using a probe card (21) comprises a step (S11) for forming a sealed space (37) between a chuck (33) and the probe card (21), a step (S12) for reducing the pressure in the sealed space (37), and a step (S14) for moving the chuck (33) a prescribed amount toward the probe card (21) in a state of reduced pressure in the sealed space (37).