METHOD FOR TEMPERATURE COMPENSATION IN SENSOR, COMPUTATION PROGRAM FOR METHOD FOR TEMPERATURE COMPENSATION, COMPUTATION PROCESSING DEVICE, AND SENSOR

摘要

Temperature compensation is performed using a computation program for temperature compensation, a computation processing, and a sensor. Deformation in a diaphragm caused by a pressure change due to the temperature of the gas in a cavity is cancelled out, and deformation of the diaphragm is minimized within the target temperature range, thereby allowing an optimum temperature compensation to be performed. The temperature compensation in a capacitance-type sensor executes calculation steps which include including a calculation step (S17) of acquiring the amount of change ΔC′ in capacitance. A parameter ΔC′ is obtained, through which it is possible to determine the degree of compensation for the deformation in the diaphragm section caused by a pressure change due to the temperature changes of the gas in the hermetically sealed space.