METHOD FOR TEMPERATURE COMPENSATION IN SENSOR, COMPUTATION PROGRAM FOR METHOD FOR TEMPERATURE COMPENSATION, COMPUTATION PROCESSING DEVICE, AND SENSOR

摘要

To provide a method for temperature compensation in a sensor, a computation program for the method for temperature compensation, a computation processing device for computationally processing the computation program, and a sensor, in which deformation in a diaphragm caused by a pressure change (thermal expansion of a gas sealed in a cavity) due to the temperature of the gas in the cavity is cancelled out, and deformation of the diaphragm is minimized within the target temperature range, thereby allowing an optimum temperature compensation to be performed. [Solution] This method for temperature compensation in a capacitance-type sensor comprises executing calculation steps which include including a calculation step (S17) of acquiring the amount of change ΔC' in capacitance, whereby there is obtained a parameter ΔC' through which it is possible to determine the degree of compensation for the deformation in the diaphragm section caused by a pressure change (thermal expansion of the gas sealed in a hermetically sealed space) due to the temperature of the gas in the hermetically sealed space.