Self-consistent temperature compensation for resonant sensors with application to quartz bulk acoustic wave chemical sensors

摘要

Since resonant sensors have a temperature sensitivity which is often greater than their sensitivity to the phenomena they are being used to detect, it is imperative to include either temperature control or temperature compensation in any resonant sensor system. The authors have developed a temperature-compensation scheme for resonant sensors which is amenable to integration into a resonator-driver integrated circuit. An integrated circuit incorporating this scheme has been designed, built, and tested.