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Tunable MEMS device and method of making a tunable MEMS device
Tunable MEMS device and method of making a tunable MEMS device
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机译:可调谐的MEMS器件和制造可调谐的MEMS器件的方法
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摘要
A tunable MEMS device and a method of manufacturing a tunable MEMS device are disclosed. In accordance with an embodiment of the present invention, a semiconductor device comprises a substrate, a moveable electrode and a counter electrode. The moveable electrode or the counter electrode comprises a first region and a second region, wherein the first region is isolated from the second region, wherein the first region is configured to be tuned, wherein the second region is configured to provide a sensing signal or control a system, and wherein the moveable electrode and the counter electrode are mechanically connected to the substrate.
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