MONOLITHIC INTERFEROMETRIC ATOMIC FORCE MICROSCOPY DEVICE

摘要

A fiber-facet AFM probe enabling high-resolution, high sensitivity measurement of a sample surface is presented. AFM probes in accordance with the present invention include an optically resonant cavity that is defined by two mirrors, at least one of which is a photonic-crystal mirror. One of the mirrors is movable and is mechanically coupled with an AFM tip such that a force imparted on the tip by an interaction with the sample surface induces a change in the cavity length of the optically resonant cavity and, therefore, its reflectivity.