Interferometric measurements of the vibration of a silicon microbeam/cantilever unit used in atomic force microscopy (AFM)

摘要

In the paper experimental results of microbeam/cantilever vibration measurements are presented. The cantilever under investigation is used as a sensor in a Atomic Force Microscope. Double-Beam Digital Interferometry with time averaging and interferogram processing was used for optimization of vibration mode visualization. Several two-frame methods with phase step between the frames were compared with the four-frame method with phase step π/2 between consecutive frames. The experimental results obtained prove that the four-frame method is the most appropriate for further quantitative amplitude and phase analysis.