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A concave ended interferometric Optical Fiber Sensor for Displacement measurement of Cantilever Probe of Atomic Force Microscope
A concave ended interferometric Optical Fiber Sensor for Displacement measurement of Cantilever Probe of Atomic Force Microscope
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机译:用于原子力显微镜悬臂式探头位移测量的凹端干涉光纤传感器
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摘要
Disclosed is an atomic force microscope. A Fabry-Perot interferometer where the intensity of light reflected at a cantilever through an optical fiber varies sensitively to a displacement of the cantilever is constructed to accurately measure a distance between the optical fiber and the cantilever. A Fabry-Perot resonator is formed by the optical fiber having an end of a concave mirror shape and a reflective surface of the cantilever. A displacement of a cantilever tip is measured by detecting a signal reflected at the resonator and a feedback signal corresponding to a variation in the displacement of the cantilever tip is generated. The displacement of the cantilever tip is kept constant by actuating a piezoelectric element in a Z-axis direction.
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