Key Laboratory of Precision Scientific Instrumentation of Anhui Higher Education Institutes Department of Precision Machinery and Precision Instrumentation University of Science and Technology of China Hefei 230026 ChinaCAS Key Laboratory of Mechanical Behavior and Design of Materials Department of Precision Machinery and Precision Instrumentation University of Science and Technology of China Hefei 230026 China;
Key Laboratory of Precision Scientific Instrumentation of Anhui Higher Education Institutes Department of Precision Machinery and Precision Instrumentation University of Science and Technology of China Hefei 230026 China;
Key Laboratory of Precision Scientific Instrumentation of Anhui Higher Education Institutes Department of Precision Machinery and Precision Instrumentation University of Science and Technology of China Hefei 230026 China;
Atomic force microscopy; Environmental temperature; Dimensional measurement; Pitch; Height;