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纳米技术与精密工程（英文）

纳米技术与精密工程（英文）

北大核心

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本刊是纳米技术与精密工程领域专业性学术期刊,主要刊登纳米技术、微机电系统、精密加工和精密测量方面用中、英文撰写的具有创造性的科学研究论文、研究报告以及重要学术问题讨论和综述等.办刊宗旨在于反映国内外该领域及相关领域的重要科学研究成果,促进学术交流和科学技术发展.读者对象为国内外理工科高等院校师生、科研人员和广大工程技术工作者。
  • 发文量：76
  • 被引量：2
  • H指数：0
  • 开始收录时间：2003,1(1)
  • CNKI综合因子：0.639
  • 维普期刊影响因子： 0.655
  • 万方期刊影响因子：0.51
  • 创刊时间：2003
  • 国内刊号/CN：12-1458/O3
    国际刊号/ISSN：1672-6030
  • 发行周期：季刊
    邮发代号：6-177
  • 主管单位：中华人民共和国教育部
    主办单位：VACANCY MICRO LASER FEMTOSECOND_LASER SENSOR PIEZOELECTRIC OPTICAL NANOTECHNOLOGY GRINDING DIAMOND
纳米技术与精密工程（英文）-联系信息
  • 主编：Xuexin Duan
  • 电话：022-27892181
  • 邮箱：nanope@tju.edu.cn
  • 地址：天津市南开区卫津路92号
  • 邮编：300072
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纳米技术与精密工程（英文） >2021年第003期

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  • 摘要：The interconnection ofwires is an important issue in vacuum-packaged microelectromechanical systems devices because of the difficulties of hermetical sealing and electrical insulation.This paper presents an approach of Au film selective patterning on highly uneven surfaces for wire interconnections of devices in which silicon-oninsulator(SOI)wafers are anodically bonded to glass.The Au film on the handle layer,functioned as an anode,was selectively removed with electrochemical dissolution in a chloride solution.The choice of etchant solution and etching conditions were optimized to improve the process efficiency,resulting in a high yield of gold portions within the via holes for wire interconnection.The proposed wire interconnection technology was employed to fabricate a vacuum-packaged resonant pressure sensor as a proof-of-concept demonstration.Reliablewire bonding and vacuum package were achieved as well as a Q factor that does not decrease over a year.As a platform technology,this method provides a new approach of wire interconnection for vacuum-packaged devices based on SOI-glass anodic bonding.
  • 摘要：Cylindrical rollers are important elements of bearings,and their machining accuracy and consistency affect the bearing quality.Using a GCr15 cylindrical roller ofФ11×12 as the processing object in this study,the effects of loading pressure,abrasive concentration,and speed combination on cylindrical roller machining precision were investigated using the orthogonal experimental design method on a double-side eccentric pendulum lapping and polishing machine.The machining parameters of the lapping stage were optimized,and the lapping optimal process parameters were determined by S/N response analysis and analysis of variance(ANOVA).The results show that when the experiment was optimized using loading pressure of 10 N/roller,abrasive concentrationof 20.0 wt%,and rotational speed combination,the material removal rate(MRR)of cylindrical roller reached 0.0896μm/min;the average roughness of the batch decreased from 0.056μm to 0.027μm,51.8%lower than the original batch average roughness,and the deviation decreased from the initial 0.022μm to 0.014μm;the batch average roundness error decreased from 0.47μm to 0.28μm,40.4%lower than the original batch average roundness error,and the deviation decreased from the initial 0.19μm to 0.038μm;and the batch average diameter variation decreased from 4.5μm to about 3.6μm,20%lower than the original batch average diameter variation.The double-side eccentric lapping of cylinder rollers does not only lead to improvement in the surface quality and shape accuracy of rollers,but also improvement in the batch consistency.
  • 摘要：We demonstrate a distributed two-dimensional(2D)strain-sensing system in optical frequency domain reflectometry(OFDR)with an Archimedean spiral arrangement of the sensing fiber.The Archimedean spiral describes a simple relationship between the radial radius and polar angle,such that each circle(the polar angle from0to2π)can sense the 2D strain in all directions.The strain between two adjacent circles can also be easily obtained because an Archimedean spiral facilitates sensing of every angle covering the full2D range.Based on the mathematical relation of Archimedean spirals,we deduce the relationship between the one-dimensional position of the sensing fiber and2D distribution in polar coordinates.The results of the experiment show that an Archimedean spiral arrangement system can achieve2D strain sensing with different strain load angles.
  • 摘要：Desktop3D printers have revolutionized how designers and makers prototype and manufacture certain products.Highly popular fuse deposition modeling(FDM)desktop printers have enabled a shift to low-cost consumer goods markets,through reduced capital equipment investment and consumable material costs.However,with this drive to reduce costs,the computer numerical control(CNC)systems implemented in FDM printers are often compromised by poor accuracy and contouring errors.This condition is most critical as users begin to use3D-printed components in load-bearing applications or to perform mechanical functions.Improved methods of low-cost3D printer calibration are needed before their open-design potential can be realized in applications,including3D-printed orthotics and prosthetics.This paper appliesmethodologies associated with high-precision CNC machining systems,namely,kinematic error modeling and compensation coupled with standardized test methods fromISO230-4,such as the ballbar for kinematic and dynamic error measurements,to examine the influence and feasibility for use on low-cost CNC/3D printing platforms.Recently,the U.S.Food and Drug Administration''''s"Technical considerations for additive manufactured medical devices"highlighted the need to develop standards specific to additive manufacturing in regulated manufacturing environments.This paper shows the benefits of themethods describedwithin ISO230-4for error assessment,alongside applying kinematic errormodeling and compensation to the popular kinematic configuration of an Ultimaker3Dprinter.A Renishaw ballbar QC10is used to quantify the Ultimaker''''s errors and thereby populate the errormodel.Thismethod quantifies machine errors and populates these in amathematicalmodel of the CNC system.Then,a post-processor can be used to compensate the printing code.Subsequently,the ballbar is used to demonstrate the dramatic impact of the error compensation model on the accuracy and contouring of the Ultimaker printer with58%reduction in overall circularity error and90%reduction in squareness error.
  • 摘要：Single-crystal sapphire is utilized as a high-performance engineering material,especially in extreme and harsh environments.However,due to its extreme hardness and brittleness,the machinability of sapphire is still a challenge.By means of nanoindentation and plunge-cut experiments,the anisotropic brittle-ductile transition of the prismatic M-plane and rhombohedral R-plane is examined by analyzing crack morphologies and the critical depth-of-cut(CDC).The experimental results of the nanoindentation tests are correlated to the plunge-cut experiment.Both the prism plane and the rhombohedral crystal plane exhibit a two-fold symmetry of ductility with various crack patterns along the machined grooves.The direction-dependent plasticity of the hexagonal sapphire crystal is mainly connected to a twinning process accompanied by slip dislocation.
  • 摘要：Single-crystal silicon is an important material in the semiconductor and optical industries.However,being hard and brittle,a silicon wafer is vulnerable to subsurface cracks(SSCs)during grinding,which is detrimental to the performance and lifetime of a wafer product.Therefore,studying the formation of SSCs is important for optimizing SSC-removal processes and thus improving surface integrity.In this study,a statistical method is used to study the formation of SSCs induced during grinding of silicon wafers.The statistical results show that grinding-induced SSCs are not stochastic but anisotropic in their distributions.Generally,when grinding with coarse abrasive grains,SSCs formalong the cleavage planes,primarily the{111}planes.However,when grinding with finer abrasive grains,SSCs tend to form along planes with a fracture-surface energy higher than that of the cleavage planes.These findings provide a guidance for the accurate detection of SSCs in ground silicon wafers.
  • 摘要：Short tool life and rapid tool wear in micromachining of hard-to-machine materials remain a barrier to the process being economically viable.In this study,standard procedures and conditions set by the ISO for tool life testing in milling were used to analyze the wear of tungsten carbide micro-end-milling tools through slot milling conducted on titanium alloy Ti-6Al-4V.Tool wear was characterized by flank wear rate,cutting-edge radius change,and tool volumetric change.The effect of machining parameters,such as cutting speed and feedrate,on tool wear was investigated with reference to surface roughness and geometric accuracy of the finished workpiece.Experimental data indicate different modes of tool wear throughout machining,where nonuniform flank wear and abrasive wear are the dominant wear modes.High cutting speed and low feedrate can reduce the tool wear rate and improve the tool life during micromachining.However,the low feedrate enhances the plowing effect on the cutting zone,resulting in reduced surface quality and leading to burr formation and premature tool failure.This study concludes with a proposal of tool rejection criteria for micro-milling of Ti-6Al-4V.
  • 摘要：Passively mode-locked fiber lasers emit femtosecond pulse trains with excellent short-term stability.The quantum-limited timing jitter of a free running femtosecond erbium-doped fiber laser working at roomtemperature is considerably below one femtosecond at high Fourier frequency.The ultrashort pulse train with ultralow timing jitter enables absolute time-of-flight measurements based on a dual-comb implementation,which is typically composed of a pair of optical frequency combs generated by femtosecond lasers.Dead-zone-free absolute distance measurement with sub-micrometer precision and kHz update rate has been routinely achieved with a dual-comb configuration,which is promising for a number of precision manufacturing applications,from large step-structure measurements prevalent in microelectronic profilometry to three coordinate measurements in large-scale aerospace manufacturing and shipbuilding.In this paper,we first review the sub-femtosecond precision timing jitter characterization methods and approaches for ultralowtiming jitter mode-locked fiber laser design.Then,we provide an overview of the state-of-the-art dual-comb absolute ranging technology in terms of working principles,experimental implementations,and measurement precisions.Finally,we discuss the impact of quantum-limited timing jitter on the dual-comb ranging precision at a high update rate.The route to highprecision dual-comb range finder design based on ultralow jitter femtosecond fiber lasers is proposed.
  • 摘要：Star sensors are indispensable spatial measurement sensors for high-resolution earth observation and astronomical observations,and the demand for high measurement accuracy of satellite sensors continues to increase;thus,the star sensor optical machine adjustment error cannot be ignored.The commonly used installation error correction method cannot solely meet the precision analysis requirements.In this paper,the relationship between the optical machine installation and the star sensor measurement error is analyzed,and several common adjustment error correctionmethods are compared.An adjustment method for optical machines is proposed to meet the requirements of very high precision star sensors.The assembly precision requirements of the investigated very high precision star sensor are analyzed considering the whole machine,and then the optical components are controlled through optical precision adjustments to satisfy the precision requirements.Finally,through the complete machine calibration,the star sensor precision adjustment for an optical machine structure is verified.This method meets the requirements of very high precision sensors and is suitable for the precision adjustment of optical machine structures,which is of practical significance to improve the precision of star sensors.
  • 摘要：A finite element method based on the cohesive zone model was used to study the micromachining process of nanosized silicon-carbide-particle(SiCp)reinforced aluminum matrix composites.As a hierarchical multiscale simulation method,the parameters for the cohesive zone model were obtained from the stress-displacement curves of the molecular dynamics simulation.The model considers the random properties of the siliconcarbide-particle distribution and the interface of bonding between the silicon carbide particles and the matrix.The machining mechanics was analyzed according to the chip morphology,stress distribution,cutting temperature,and cutting force.The simulation results revealed that the random distribution of nanosized SiCp causes non-uniform interaction between the tool and the reinforcement particles.This deformation mechanics leads to inhomogeneous stress distribution and irregular cutting force variation.
  • 摘要：Dielectrophoretic(DEP)force is significant inmanipulating tiny objects in micro/nano scale.To study the effect of electric interaction force on particle manipulation,a microstructure consisting of a pair of strip electrodes and a sudden contraction micro-channel was constructed.Besides DEP force and hydrodynamic force acting on single particle,the numerical model also involved electric interaction force and force moment on two particles.The analyses revealed that the particle-particle interaction force was in the same order as that of DEP force on single trapped particle.The interaction force resulted in trapping single particle failure under continuous DEP force.Thus,pulsed DEP force,turning on/off DEP force at a given time interval,was suggested.During the“off”period,the velocity difference of the two particles located at sudden contraction micro-channel enlarged the gap between them and further weakened the particle-particle interaction.By a proof-of-concept experiment,both the trapping behavior of single particle and that of two particles were in good agreement with the model.With carefully controlled parameters,the reliable function of retaining single particlewas realized by pulsed DEP.
  • 摘要：In this paper,an analytical scientific approach is presented for the design and analysis of an air-turbine-driven paint spray spindle,and it is used to improve further the design concept of the existing spindle applied in automotive coating and paint spraying applications.The current spindle on the market can operate at a maximum speed of 100,000 rpm and features a maximum bell size of 70mm diameter.Given the increasing demands for high automotive coating/painting quality and productivity in assembly,the design and development of a paint spray spindle with a speed of 145,000 rpm or higher is needed.Computational fluid dynamics(CFD)-based simulation is applied in the approach.Accordingly,CFD simulation-based design and analysis are undertaken,covering the characteristic factors of velocity,pressure of the air supply,rotational speed of the air-turbine,and torque and force reaction on the turbine blades.Furthermore,the turbine blade geometric shape is investigated through the simulations.Three geometrical concepts have been investigated against the original model.The results on Concept_03 verified the higher angular velocity speeds against the theoretical model.The pressure and velocity effects in the blades have been investigated.The results showthat the pressure and velocity of the air supply driving the turbine are critical factors influencing the stability of turbine spinning.The results also demonstrate that the force acting on the blades is at the highest level when the adjacent face changes froma straight surface into a curve.Finally,changing the geometrical shape in the turbine likely increases the tangential air pressure at the blades surface and relatively increases the magnitude of the lateral torque and force in the spindle.Notwithstanding this condition,the analytical values surpass the theoretical target values.
  • 摘要：As a simple,reproducible,and pollution-free technique with the potential of integration and automation,laser processing has attracted increasing attention.Laser processing,which includes laser polishing,laser cleaning,and fabrication of laser-induced micro-/nano-structures,has been demonstrated to yield smooth,clean,functional surfaces and effective joining.Laser polishing is an advanced,highly efficient,and ecofriendly polishing technology.This study demonstrated the laser polishing of a selective laser-melted Inconel 718(IN718)superalloy and a titaniumalloy sample.The surface roughnesses Ra and Rz of the IN718 superalloy were respectively reduced from 8 and 33μm to 0.2 and 0.8μm,and the Ra of the titanium alloy was reduced from 9.8μm to 0.2μm.Moreover,the wear resistance and corrosion resistance of the IN718 were apparently improved.As another surface-related processingmethod,laser cleaningwas used to clean terminal blocks.Almost all the contaminants were removed,as verified by the absence of their chemical compositions and the decreased surface roughness.In addition,a superhydrophobic surface with a contact angle of over 160°and sliding angle of b8°on stainless steel was obtained by laser texturing treatment.These results demonstrate the high potential of laser processing in the scientific,technological,and industrial fields.
  • 摘要：Technological progress has led to increased demand for small components with tiny features,which cannot be achieved through conventional machining.Industrial application of processes based on microcutting is limited by some issues concerning the geometrical scale.The process performance is significantly affected by millingmachine,tool holder,tool,workpiecematerialmicrostructure,workpiece fixtures,and process parameters.At present,an ultimate micromachining assessment procedure is not available.This study aims to propose and conduct an experiment on a testing procedure for micromilling.The set up to be implemented and the output to be considered are defined and described.Threemajor stages are identified:estimation of the effective bandwidth of the load cell–tool holder system,the millingmachine natural frequency measurement,and micromilling test execution.The entire procedure is performed,and its robustness is demonstrated.
  • 摘要：Even as gigahertz(GHz)acoustic streaming has developed into a multi-functional platform technology for biochemical applications,including ultrafastmicrofluidicmixing,microparticle operations,and cellar or vesicle surgery,its theoretical principles have yet to be established.This is because fewstudies have been conducted on the use of such high frequency acoustics inmicroscale fluids.Another difficulty is the lack of velocimetrymethods for microscale and nanoscale fluidic streaming.In thiswork,we focus on the basic aspects of GHz acoustic streaming,including its micro-vortex generation principles,theoretical model,and experimental characterization technologies.We present details of a weak-coupled finite simulation that represents our current understanding of the GHz-acoustic-streaming phenomenon.Both our simulation and experimental results show that the GHzacoustic-induced interfacial body force plays a determinative role in vortex generation.We carefully studied changes in the formation of GHz acoustic streaming at different acoustic powers and flow rates.In particular,we developed a microfluidic-particle-image velocimetry method that enables the quantification of streaming at the microscale and even nanoscale.This work provides a full map of GHz acoustofluidics and highlights the way to further theoretical study of this topic.
  • 摘要：Xuexin Duan received his PhD degree at University of Twente,Netherland(2010).A??er Postdoc studies at Yale University,he moved to Tianjin University.Currently,he is a full professor at State Key Laboratory of Precision Measuring Technology&Instruments,Department of Precision Instrument Engineering of Tianjin University.His Research is about MEMS/NEMS devices,Microsystem,Micro?uidics and their interfaces with Chemistry,Biology,Medicine,and Environmental science.He has published more than 70 peer-reviewed research ar??cles in top research journals and applied/issued 20 US and Chinese patents.He has been awarded as Na??onal 1000 Plan Professorship for Young Talents(2014),Outstanding Youth Funds of Tianjin(2017),and Young Scien??st of World Economic Forum(2018).
  • 摘要：Studies on surface wettability have received tremendous interest due to their potential applications in research and industrial processes.One of the strategies to tune surface wettability is modifying surface topography at micro-and nanoscales.In this research,periodic micro-and nanostructures were patterned on several polymer surfaces by ultra-precision single point diamond turning to investigate the relationships between surface topographies at the micro-and nanoscales and their surface wettability.This research revealed that single-point diamond turning could be used to enhance the wettability of a variety of polymers,including polyvinyl chloride(PVC),polyethylene 1000(PE1000),polypropylene copolymer(PP)and polytetrafluoroethylene(PFTE),which cannot be processed by conventional semiconductor-based manufacturing processes.Materials exhibiting commonwettability properties(θ≈90°)changed to exhibit“superhydrophobic”behavior(θ?150°).Comparedwith the size of the structures,the aspect ratio of the void space between micro-and nanostructures has a strong impact on surface wettability.
  • 摘要：High-performance connection frames are of great significance for ultra-high acceleration and ultra-precision positioning in macro-micro motion platforms.This paper first takes the connection frame as a research object,builds a finite element model(FEM)of the natural frequency of the frame,and then verifies the correctness of this model.The frequency sensitivity method is then used to perturb the structural parameters of the FEM of the connection frame,and the sensitivities of the first-order natural frequency and mass of the corresponding structural parameters are obtained by calculation and analysis.The design variables are also determined.The natural frequency is used as the optimization objective,and the design parameters andmass of the connection frame are constrained.The structural parameters of the connecting frame are obtained through optimization,and the model is built and verified by experiments.The results show that the first-order natural frequency of the connecting frame is effectively improved by the frequency sensitivity method,avoids resonance between the connecting frame and the voice coil motor,and realizes the lightweight design of the connection frame.This research provides a reliable basis for the stable operation and ultra-precision positioning of ultra-high acceleration macro-motion platforms.
  • 摘要：This study reports the development and performance of a pilot-scale barrel atmospheric plasma reactor for the atmospheric plasma activation treatment of polymer particles.The polymer particles treated included acrylonitrile butadiene styrene(ABS)and polypropylene(PP).These particles had diameters in the range of 3–5mm.The initial studies were carried out using a laboratory-scale barrel reactor designed to treat polymer particle batch sizes of 20 g.A pilot-scale reactor that could treat 500 g particle batch sizes was then developed to facilitate pre-industrial-scale treatments.The effect of operating pulse density modulation(PDM)in the range 10%– 100%and plasma treatment time on the level of activation of the treated polymers were then investigated.ABS revealed a larger decrease inwater contact angle compared with PP after plasma treatment under the same conditions.The optimal treatment time of ABS(400 g of polymer particles)in the pilot-scale reactorwas 15 min.The plasma-activated polymer particles were used to fabricate dog-bone polymer parts through injection molding.Mechanical testing of the resulting dog-bone polymer parts revealed a 10.5%increase in tensile strength compared with those fabricated using non-activated polymer particles.
  • 摘要：Annealing nanodiamonds(ND)at high temperatures up to 1700°C is a common method to synthesize carbon onions.The transformation from NDs to carbon onions is particularly interesting because of carbon onions''potential in the field of tribology and their application in ultra-charge/discharge devices.In this paper,a novel surface-enhanced Raman scattering technique that involves coating the sample with nanoscopic gold particles is proposed to characterize the NDs after different annealing treatments.Conventional Raman and surfaceenhanced Raman spectra were obtained,and the changes of peak parameters as the function of annealing temperature were evaluated.Itwas found that thewidths of the D and the G peaks decreasedwith increasing annealing temperature,reflecting an improved order in the sp^2-hybridized carbon during the transformation from NDs to carbon onions.After annealing at 1700℃,the sp^2-carbon was highly ordered,indicating desirable electrical conductivity and lubricity.With increasing annealing temperature,the D peak showed a blue shift of almost 30 cm^-1,while the G peak merely shifted by 5 cm^-1.For annealing temperatures above 1100℃,an increase of intensity ratio ID/IG was observed.Compared to the uncoated area,red shifts of 0.5–2 cm^-1 and of 5–9 cm^-1 for the G and D peaks,respectively,were detected for the gold-coated area,which was due to the coupling of the plasmons and the phonons of the samples.

    纳米技术与精密工程（英文）的期刊信息

    • 曾用名：纳米技术与精密工程
    • 创刊时间：2003
    • 地区：
    • 语言：中文
    • 热门主题：天津大学;中国微米纳米技术学会
    • 学科分类： 机械、仪表工业;

      Engineering:Industrial and Manufacturing Engineering;Mechanical Engineering;Materials Science:Nanoscience and Nanotechnology;Physics and Astronomy:Instrumentation;

    纳米技术与精密工程（英文）的获奖情况

    纳米技术与精密工程（英文）的收录情况

    • • 文摘杂志
    • • 北大核心期刊（2014版）
    • • 化学文摘（网络版）
    • • 中国科学引文数据库（2011-2012）
    • • 中国科学引文数据库（2013-2014）
    • • 中国科学引文数据库（2015-2016）
    • • 中国科学引文数据库（2017-2018）
    • • 中国科学引文数据库（2019-2020）
    • • 开放获取期刊指南
    • • 工程索引
    • • 哥白尼索引
    • • 日本科学技术振兴机构数据库
    • • 文摘与引文数据库
    • • 中国科技核心期刊

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    • 通讯地址：天津市南开区卫津路92号
    • 邮编：300072
    • 联系电话：022-27892181
    • 邮箱：nanope@tju.edu.cn
    • 期刊栏目：纳米技术；微机电系统；精密加工；精密测量

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