THERMAL ACID GENERATOR BOUND MONOMER AND POLYMER OBTAINED FROM THE THERMAL ACID GENERATOR BOUND MONOMER AND THE RESIST UNDERLAYER COMPOSITION INCLUDING THE POLYMER AND METHOD OF FORMING PATTERNS USING THE RESIST UNDERLAYER COMPOSITION

摘要

The present invention relates to: a thermal acid generator bound monomer denoted by chemical formula 1; a polymer obtained from the thermal acid generator bound monomer; a resist under-layer composition including the polymer; and a formation method of patterns using the resist under-layer composition. In the chemical formula 1, A, L, R1, R2, and n are described in the present specification.