Slots-excited Racetrack ECR Plasma Source for Roll-to-roll(scanning) Processing

摘要

PURPOSE: A slot excited long racetrack electron cyclotron resonance (ECR) plasma source for roll-to-roll (scanning) processing is provided to make a plasma source corresponding to a large area base material by adjusting the number of slots arranged in a plasma chamber. CONSTITUTION: A waveguide resonator (120) is mounted on a base plate (110). A plurality of slots is formed at the inner side of the waveguide resonator, with a constant interval therebetween. A tuner (150) delivers an electromagnetic wave oscillated from an electromagnetic wave oscillator to the waveguide resonator. A magnet part comprises a plurality of magnets. A plasma chamber (140) is disposed along the inner circumference of the magnet part, and has an electromagnetic wave injection window (141) for introducing the electromagnetic wave to the inside of the plasma chamber.