APPARATUS AND METHOD FOR GENERATING GAS-LIQUID MIXED FLUID, AND PROCESSING APPARATUS AND PROCESSING METHOD

摘要

The present invention provides a gas-liquid mixed fluid generation apparatus which can convey liquid with a lowest pressure and enable gas to dissolve in the liquid, a gas-liquid mixed fluid generation method, a processing apparatus and a processing method. According to the embodiments, the gas-liquid mixed fluid generation apparatus (3) is provided with a container (3a); a liquid supply flow path (3b) communicated with the container (3a) and used for supplying the liquid with gas dissolved therein to the container (3a); an inner pressure adjustment portion (3d) capable of switching the container (3a) from a closed state to an open state, and enabling the container (3a) to be in the open state and enabling the inner pressure of the container (3a) to be smaller than the pressure for pushing the liquid inside the liquid supply flow path (3b) to the container (3a) in the period of supplying liquid to the container (3a) through the liquid supply flow path (3b); and a gas supply flow path (3e) communicated with the container (3a) and used for supplying gas for the space inside the container (3a) for containing the liquid in the closed state.