Wafer retainer used during inspection in processing station, has movement device that is provided to move movable receiving unit transversely to peripheral edge of wafer

摘要

The wafer retainer (1) has three holding devices (3) that are provided for jointly receiving a wafer (6). A contact portion is adapted to engage the wafer in the edge region (6a). The receiving unit is moved relative to the other receiving units transversely to the peripheral edge (13) of the wafer. The movement device (4) is provided to move the movable receiving unit transversely to the peripheral edge of the wafer.