-GALLIUM OXIDE BASED MONOCRYSTAL AND -GALLIUM OXIDE BASED MONOCRYSTAL BODY

摘要

PROBLEM TO BE SOLVED: To provide a -GaObased monocrystal which enables the formation of a region having superior conductivity, and a -GaObased monocrystal body.SOLUTION: According to an embodiment, a -GaObased monocrystal is provided which comprises: a first region having side faces and a bottom face and controlled to have a first donor concentration; and a second region embracing the side faces and the bottom face of the first region, and controlled to have a second donor concentration lower than the first donor concentration. In addition, a -GaObased monocrystal body is provided, which comprises: a first region having a first donor concentration and controlled in its shape in a plan view and the depth thereof; and a second region having a second donor concentration lower than the first donor concentration and controlled in an interface where the second region is in contact with the first one.