Error compensation system using encoder feedback, error mapping, and pneumatic control

摘要

PROBLEM TO BE SOLVED: To provide an error compensation system using encoder feedback, error mapping, and air pressure control.SOLUTION: A linear encoder 23 is comprised of a pair of side face linear encoders 23-1 and 23-1' installed on the side face of a mobile carriage 25 and a pair of low face linear encoders 23-2 and 23-2' installed at the lower part of one side section of the mobile carriage 25. This linear encoder 23 configured as mentioned above moves along a scale having a reference mark, an L track for compensating a vertical position error and a T track for compensating a horizontal position [error] so that it is possible to compensate an error relating to flatness, pitch, straightness, yaw, and roll in a high accurate level. Therefore, it is possible to minimize a section whose working is impossible, and to reduce working costs, and to achieve a precise stage.