TRANSFER DEVICE AND TRANSFER METHOD OF SUBSTRATE FOR DEPOSITING COMPOUND SEMICONDUCTOR FILM, AND DEPOSITION SYSTEM AND DEPOSITION METHOD OF COMPOUND SEMICONDUCTOR FILM

摘要

PROBLEM TO BE SOLVED: To provide a transfer device and a transfer method of a substrate for depositing a compound semiconductor film capable of automatically transferring a substrate for depositing a compound semiconductor film, by eliminating the impact of particles or the problem of transfer to the substrate rear surface or undesired deposition on the substrate rear surface.;SOLUTION: A transfer device 170 has a support 70 for supporting a substrate holder 40, a lifting member 91 capable of lifting and lowering a substrate at a substrate holding part 80 of the substrate holder 40, and a shield member 82 which is lifted and lowered with lifting and lowering of the lifting member 91, interposed between the substrate W and the lifting member 91 when the lifting member 91 receives the substrate, and shields a hole 81 into which the lifting member 91 of the substrate holder 40 is inserted, on the rear side of the substrate W when the substrate is held at the substrate holding part. In a state where the lifting member 91 is lifted, the substrate W is mounted on the shield member 82, or the substrate W on the shield member 82 is transported by a transport device 201.;COPYRIGHT: (C)2015,JPO&INPIT