Sample stage device and electron beam device

摘要

PROBLEM TO BE SOLVED: To move a specimen to a desired position in a desired attitude by a simple and intuitive operation.;SOLUTION: When a multi-axial stage 40 of a scanning electron microscope 10 is rotated horizontally, inclined or moved horizontally, an operation of rotating, inclining or horizontally moving an image for specification is performed by means of a mouse 62 while creating an image for specification from an SEM image obtained from a signal of a secondary electron detector 20 and displaying the image on an image display unit 61. A coordinate generation means 52 converts the current coordinates of the multi-axial stage 40 based on the image for specification after operation, and multi-axial stage drive control means 53 drives the multi-axial stage 40 by the converted coordinates.;COPYRIGHT: (C)2012,JPO&INPIT