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Film roll for semiconductor device, method for manufacturing semiconductor device, and semiconductor device

机译:半导体装置用薄膜卷,半导体装置的制造方法以及半导体装置

摘要

PROBLEM TO BE SOLVED: To suppress a transfer mark to an adhesive film when a film for a semiconductor device in which an adhesive film with a dicing film is laminated on a separator at a predetermined interval is wound in a roll shape. To provide a film roll. A film roll for a semiconductor device in which a film for a semiconductor device is wound around a cylindrical winding core, and the film for a semiconductor device has a dicing film in which a dicing film and an adhesive film are laminated. The film roll for semiconductor devices which has the structure by which the adhesive film was laminated | stacked on the separator at predetermined intervals, and the tensile storage elastic modulus in 25 degreeC of a separator is 1 GPa or more. [Selection] Figure 1
机译:解决的问题:当将用于半导体器件的膜以预定的间隔层压在隔板上时,为了抑制向粘合膜的转印痕迹,在该半导体器件用膜中,将具有划片膜的粘合膜以预定间隔层压在隔板上。提供胶卷。用于半导体装置的膜卷,其中用于半导体装置的膜缠绕在圆柱形绕组芯上,并且用于半导体装置的膜具有切割膜,在该切割膜中层压有切割膜和粘合膜。具有层压粘合膜的结构的半导体器件用膜卷|隔板以预定的间隔层叠,隔板在25℃下的拉伸储能弹性模量为1GPa以上。 [选择]图1

著录项

  • 公开/公告号JP5714090B1

    专利类型

  • 公开/公告日2015-05-07

    原文格式PDF

  • 申请/专利权人 日東電工株式会社;

    申请/专利号JP20130265818

  • 申请日2013-12-24

  • 分类号H01L21/301;H01L21/52;H01L21/56;H01L23/29;H01L23/31;C09J7/02;C09J201;C09J11/04;

  • 国家 JP

  • 入库时间 2022-08-21 15:28:27

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