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Capacitive pressure sensor with intrinsic temperature compensation
Capacitive pressure sensor with intrinsic temperature compensation
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机译:具有固有温度补偿的电容式压力传感器
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摘要
Pressure sensors and their methods of use are described. In one embodiment, a pressure sensor includes a probe body and a capacitive sensor disposed at a distal end of the probe body. The capacitive sensor produces a sensing capacitance. The pressure sensor also includes a shunt capacitance. In the described pressure sensor, a change in the sensing capacitance due to dimensional changes associated with a temperature change is offset by a corresponding change in the shunt capacitance.
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