schaltungsanordnung for temperature compensation of capacitive pressure and differential pressure sensors.

摘要

The invention relates to temperature-compensating circuitry for capacitive pressure or pressure-difference transducers. The latter contains two measuring capacitors (1, 2), which are each arranged in the feedback branch of two measuring integrators (3, 4), and whose capacitance values, which vary with the pressure or pressure difference to be detected, are converted by the measuring signals. Moreover, there is a negative feedback circuit with a Schmitt trigger circuit (5), which generates a temperature-dependent control signal for the measuring integrators (3, 4) from at least one measuring signal. …IMAGE…