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CARRIER FOR FLEXIBLE SUBSTRATE, SUBSTRATE PROCESSING APPARATUS INCLUDING THE CARRIER, AND METHOD OF MANUFACTURING FLEXIBLE DISPLAY APPARATUS
CARRIER FOR FLEXIBLE SUBSTRATE, SUBSTRATE PROCESSING APPARATUS INCLUDING THE CARRIER, AND METHOD OF MANUFACTURING FLEXIBLE DISPLAY APPARATUS
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机译:柔性基板的载体,包括该载体的基板处理设备以及制造柔性显示设备的方法
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摘要
Provided is a carrier for a flexible substrate which is capable of handling a flexible substrate during a flexible substrate processing process, while allowing the flexible substrate to be easily separated. Also provided is a substrate processing apparatus, including the carrier, and a method of manufacturing a flexible display apparatus. The carrier includes a substrate supporting portion having a top surface including a mounting surface, an outer circumferential surface, surrounding the mounting surface, and a first heat cutting portion. The first heat cutting portion is located outside the mounting surface so as to be exposed on the top surface and generates heat when a current flows through the first heat cutting portion.
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