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Self-correcting power grid for semiconductor structures method

机译:用于半导体结构的自校正电网方法

摘要

Aspects of the present invention relate to a self-correcting power grid for a semiconductor structure and a method of using thereof. Various embodiments include a self-correcting power grid for a semiconductor structure. The power grid may include a plurality of interconnect layers. Each of the plurality of interconnect layers may include a plurality of metal lines, where each of the plurality of metal lines are positioned substantially parallel to one another and substantially perpendicular to a plurality of distinct metal lines in adjacent interconnect layers. Additionally the interconnect layers may include a plurality of fuses formed within each of the metal lines of the plurality of interconnect layers. In the power grid, at least one of the fuses positioned immediately adjacent to a defect included in the power grid may be configured to blow during a testing process to isolate the defect.
机译:本发明的各方面涉及一种用于半导体结构的自校正电网及其使用方法。各种实施例包括用于半导体结构的自校正电网。电网可以包括多个互连层。多个互连层中的每一个可以包括多条金属线,其中,多条金属线中的每条基本上彼此平行并且基本上垂直于相邻互连层中的多条不同的金属线。另外,互连层可以包括形成在多个互连层的每个金属线内的多个熔丝。在电网中,紧邻电网中包括的缺陷定位的熔丝中的至少一个可以被配置为在测试过程期间烧断以隔离缺陷。

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