首页>
外国专利>
Microelectromechanical resonators having offset 100 and 110 crystal orientations
Microelectromechanical resonators having offset 100 and 110 crystal orientations
展开▼
机译:具有[100]和[110]偏移晶体取向的微机电谐振器
展开▼
页面导航
摘要
著录项
相似文献
摘要
A TPoS resonator includes a substrate and a resonator body suspended over the substrate by at least a first pair of fixed supports (e.g., tethers) that attach to first and second ends of the resonator body. The resonator body includes monocrystalline silicon, which has a [100] crystallographic orientation that is offset by ±α degrees relative to a nodal line of the resonator body (e.g., tether-to-tether axis) when the resonator body is operating at a resonant frequency, where a is a real number in a range from about 5 to about 19 and, more preferably, in a range from about 7 to about 17. The resonator may be an extensional-mode resonator and the resonator body may be rectangular-shaped with unequal length and width dimensions.
展开▼