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Measuring/inspecting apparatus and measuring/inspecting method enabling blanking control of electron beam
Measuring/inspecting apparatus and measuring/inspecting method enabling blanking control of electron beam
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机译:能够进行电子束的消隐控制的测量/检查装置和测量/检查方法
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摘要
Technique capable of achieving shortening of settling time, which is caused by ringing, etc. of a blanking control signal is provided. A measuring/inspecting apparatus is configured to have a main blanking unit and a correction blanking control unit as a high-speed switching control unit of an electron beam. During the period of switching of a main blanking control signal from ON to OFF, a correction blanking control signal is applied in real time in synchronization with the switching. The ringing caused by the main blanking are corrected so as to be cancelled out by that, the settling time is shortened as a result.
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